- 學經歷
- 國立台灣大學 化工學士，1975-1979
- University of Washington, Seattle, USA. 化工博士，1982-1986
- Quantum Chemical Corporation, USA. 1986-1988
Author Introduction
Eric Lee is a chair professor in the Department of Chemical Engineering, National Taiwan University, Taipei, Taiwan. He is also a fellow of the Royal Society of Chemistry, United Kingdom. His major research area focuses on phoretic motions of colloidal entities, either highly or weakly charged, such as rigid particles, liquid droplets (both Newtonian and polymeric), gas bubbles, porous and soft particles, and so on. He has extended his research endeavors in recent years to the field of artificial intelligence (AI) as well, focusing on the applications of machine learning (ML) to the manufacturing processes of semiconductors. He has been conducting various research projects for the world-leading semiconductor companies in Taiwan, such as the famous TSMC.
- 目前研究主題
(一) 膠體粒子之電動力學現象
- 探討一般高電量微米及奈米粒子之電動力學現象，特別是電泳運動(Electrophoresis)與擴散泳運動(Diffusiophoresis)。近年來亦致力探討軟球(soft particle)及液滴在一般電解質或離子液體(Ionic liquids)內之特有運動現象及不同邊界之效應。
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介電泳(Dielectrophoresis, DEP)應用於微流體(Microfluidics)及奈米流體(Nanofluidics)操作在各類粒子下之特有行為探討。
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擴散泳在藥物輸送上之應用，包含微奈米乳液(Microemulsion and Nanoemulsion)，脂質體(Liposome)，SPB(Spherical Polyelectrolyte Brush)，及Core-Shell複合粒子。
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高分子流體力學，特別是高分子液滴之各類泳動行為及其應用之探討。
相關發表之SCI論文如下:
- Jessica Tseng, Judy Su, Kevin Chang, Amy Chang, Lily Chuang, Amanda Lu, Rose Lee and Eric Lee, “Electrophoresis of a Dielectric 2.Droplet with Constant Surface Charge Density,” Electrophoresis, 44(23), 1810-1817 (2023).
- Leia Fan, Jason Lin, Annie Yu, Kevin Chang, Jessica Tseng, Judy Su, Amy Chang, Shirley Lu and Eric Lee, “Diffusiophoresis of a Weakly Charged Liquid Metal Droplet,” Molecules, 28(9), 3905 (2023).
- Leia Fan and Eric Lee, “Diffusiophoresis of a Highly Charged Conducting Fluid Droplet,” Physics of Fluids, 34(6) (2022): 062013.
- Leia Fan, Yvonne Wu, Elaine Jian, Jessica Tseng, Renee Wan, Andy Tseng, Jason Lin and Eric Lee, “Diffusiophoresis of a Highly Charged Dielectric Fluid Droplet Induced by Diffusion Potential,” Physics of Fluids, 34(4) (2022), 042003.
- Meng‐Yu Tsai, Leia Fan, Jessica Tseng, Jason Lin, Andy Tseng and Eric Lee, "Electrophoresis of a Highly Charged Fluid Droplet in Dilute Electrolyte Solutions: Analytical Hückel‐Type Solution." Electrophoresis, 2022.
- Leia Fan, Elaine Jian, Wen-Chun Chang, Yvonne Wu, Jason Lin, Andy Tseng, Jessica Tseng, Renee Wan, Annie Yu, and Eric Lee, “Diffusiophoresis in Suspensions of Highly Charged Soft Particles,” Electrophoresis, 2022.
- Yvonne Wu, Elaine Jian, Leia Fan, Jessica Tseng, Renee Wan, and Eric Lee, "Diffusiophoresis of a Highly Charged Dielectric Fluid Droplet," Physics of Fluids , 33(12) (2021) , 122005.
- Meng-Yu Tsai, Yvonne Wu, Leia Fan, Elaine Jian, Jason Lin, Jessica Tseng, Andy Tseng, Renee Wan, and Eric Lee, “Analytical Solution to Dielectric Droplet Diffusiophoresis under Debye-Hückel Approximation,” Electrophoresis, 43,495-500, (2021).
- Yvonne Wu, Leia Fan, Elaine Jian, Jessica Tseng, and Eric Lee, "Electrophoresis of a Highly Charged Dielectric Fluid Droplet in Electrolyte Solutions," Journal of Colloid and Interface Science 598 (2021): 358-368.
- Yvonne Wu, and Eric Lee, “Diffusiophoresis of a Highly Charged Soft Particle Normal to a Conducting Plane,” Electrophoresis, 42, 2383-2930(2021).
- Yvonne Wu, Wen-Chun Chang, Leia Fan, Elaine Jian, Jessica Tseng, and Eric Lee, “Diffusiophoresis of a Highly Charged Soft Particle in Electrolyte Solutions Induced by Diffusion Potential,” Physics of Fluids, 33(1), 012014, (2021).
(二) AI人工智與機器學習(Machine Learning, ML)慧在半導體製程領域之應用
如何加速光學鄰近校正 (optical proximity correction, OPC) 的模型建立與運行速度及提升準確度，是半導體製造工業中的一個重要課題。現今主流的model-based OPC是本實驗室於機器學習 (Machine learning) 領域的主要研究目標，包含自動監測熱點 (Hotspot) 之卷積神經網路(Convolutional Neural Network, CNN)圖像視覺辨識模型、生成對抗網路 (Generative Adversarial Network, GAN) 模型用於生成少量數據集以避免模型過擬合 (Overfitting) 和整合物理定律與數據驅動模型應用於新興奈米壓印微影 (Nanoimprint Lithography, NIL) 製程之策略分析與參數優化。
相關發表之SCI論文如下:
- Chien, Jean, and Eric Lee. "Fuzzy pattern grouping for machine learning-based OPC optimization." DTCO and Computational Patterning V. Vol. 13980. SPIE, 2026.
- Chien, Jean, and Eric Lee. "An Integrated Physics-Based and Data-Driven Framework for Defect Prediction in Advanced Nanoimprint Lithography Toward Inorganic Semiconductor Patterning." Micromachines 17.6 (2026): 674.
- Jean Chien, Lily Chuang and Eric Lee. Physics-Based Simulation of Master Template Fabrication: Integrated Modeling of Resist Coating, Electron Beam Lithography, and Reactive Ion Etching. Electronics 2025, 14, 4751.
- Jean Chien, and Eric Lee. "Deep-CNN-Based Layout-to-SEM Image Reconstruction with Conformal Uncertainty Calibration for Nanoimprint Lithography in Semiconductor Manufacturing." Electronics 14.15 (2025): 2973.
- Tseng, Jessica, Jean Chien, and Eric Lee. "Advanced defect recognition on scanning electron microscope images: a two-stage strategy based on deep convolutional neural networks for hotspot monitoring." Journal of Micro/Nanopatterning, Materials, and Metrology 23.4 (2024): 044201-044201.
(三) 奈米通道之電動力學現象及其在半導體蝕刻技術之應用:
以修正型電動力學方程式(Modified Poisson-Boltzmann equation)模擬奈米通道中蝕刻液之成分離子分布，探討通道中擴散滲透現象及其定性與定量之表徵，找出濕式蝕刻之非等向性解決之關鍵因素，並以基礎擴散泳運動之模擬技術，探討蝕刻製程中副產物移除辦法，縮短Gate All Around(GAA)底層與入口端之蝕刻效率差異，以突破IC尖端技術之瓶頸。
相關發表之SCI論文如下:
- Lily Chuang, and Eric Lee. "Diffusiophoresis of a charged dielectric fluid droplet in a cylindrical pore induced by diffusion potential." Colloids and Interfaces (2026)
- Sunny Chen, Lily Chuang, Nemo Chang, Jean Chien, Venesa Liao and Eric Lee. "Diffusiophoresis of a Conducting Liquid Metal Droplet (LMD) in a Cylindrical Pore." Molecules 30.16 (2025): 3372.
- Lily Chuang, Sunny Chen, Nemo Chang, Jean Chien, Venesa Liao and Eric Lee."Diffusiophoresis of a Weakly Charged Dielectric Fluid Droplet in a Cylindrical Pore." Micromachines 16.6 (2025): 707.
- 執行中之研究計畫
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台積電先進半導體封裝製程: Establish a Simulator and AI Model to Predict Thermosetting Material Flowability，台積電(TSMC)，執行期間2025至2026年，總共一百二十萬元。
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台積電先進半導體製程(1.4奈米): To simulate fluid distribution during wafer processing to make vertical & lateral chemical etching rate difference，台積電(TSMC)，執行期間2024至2025年，總共一百二十萬元。
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先進奈米壓印微影製程之整合三階段模型建立與數據分析（Model Development and Data Analysis for Three-Stage Integration of Advanced Nanoimprint Lithography Processes），聯華電子股份有限公司 (United Microelectronics Corporation) ，執行期間2024至2026年，一共兩百萬元。
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開發以表面鍍金屬高分子薄膜結合介電泳技術移除溶液中低濃度奈米粒子之技術，達興材料股份有限公司 (Daxin Materials Corporation)，執行期間2024至2025年，總共一百五十萬元。
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機器學習應用在hotspot的偵測與OPC verification model 之修正，聯華電子股份有限公司 (United Microelectronics Corporation) 產學合作計畫，執行期間2022至2024年，一共三百萬元。
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開發利用介電泳技術移除有機溶劑中50nm以下粒子，且具量產潛力之技術，達興材料股份有限公司 (Daxin Materials Corporation)，執行期間2022至2024年，一共約三百五十萬元。
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導電(conduting)液態金屬液滴(LMD)於稀薄離子溶液中之擴散泳現象，科技部專題研究計畫，113-2221-E-002-064 -，執行期間2024至2025年，約130萬元。
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多孔粒子於稀薄離子溶液中之擴散泳現象，科技部專題研究計畫，112-2221-E-002 -030 -，執行期間2023至2024年，約120萬元。